JPH0350055U - - Google Patents
Info
- Publication number
- JPH0350055U JPH0350055U JP11172789U JP11172789U JPH0350055U JP H0350055 U JPH0350055 U JP H0350055U JP 11172789 U JP11172789 U JP 11172789U JP 11172789 U JP11172789 U JP 11172789U JP H0350055 U JPH0350055 U JP H0350055U
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- impurity
- metal
- impurity object
- main
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11172789U JPH0634372Y2 (ja) | 1989-09-25 | 1989-09-25 | 不純物蒸発装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11172789U JPH0634372Y2 (ja) | 1989-09-25 | 1989-09-25 | 不純物蒸発装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350055U true JPH0350055U (en]) | 1991-05-15 |
| JPH0634372Y2 JPH0634372Y2 (ja) | 1994-09-07 |
Family
ID=31660194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11172789U Expired - Lifetime JPH0634372Y2 (ja) | 1989-09-25 | 1989-09-25 | 不純物蒸発装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0634372Y2 (en]) |
-
1989
- 1989-09-25 JP JP11172789U patent/JPH0634372Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0634372Y2 (ja) | 1994-09-07 |